Inspection report of surface shape accuracy of fluorine crystal mica sheet
18-03-2023
Testing unit: Changchun Institute of Optics and Precision Machinery and Physics, Chinese Academy of Sciences.
Method of measurement: optical non-contact measurement (micro-interferometric measurement).
Measuring instrument: 4D interferometer (detection light source wavelength is 632.8nm).
The test results are as follows:
Measuring area | Measurement result |
10*10mm | Then the accuracy of the surface shape is 1/5λ（λ=632.8nm），About 127nm |
1*1mm | The accuracy of surface shape is 1/80λ，About 3.5nm |
5um*5um | Surface roughness is about 0.6nm |
Attachment (10*10mm range measurement results):
Changchun Taiyuan Fluorophlogopite Co., Ltd.
March 17, 2023